Semiconductor Industry
Delivering Equipment Data Using
Equipment Data Acquisition
(EDA) Standards from SEMI
CenterPoint | portA is a SEMI compliant implementation of Interface A - the SEMI EDA standards. It is available for Microsoft Windows, Sun Solaris and Linux operating systems.
As CenterPoint | portA is built on CenterPoint's own industry approved code-base for manufacturing integration, it can easily be installed without any need for additional third-party software such as internet servers or virtual machines. This results in very low resource consumption (low memory footprint, low hard disk requirements) and very high data throughput (approx. 20,000 data points per second) which is essential in an already approved equipment automation environment. portA requires no third-party databases. Therefore the installation of portA is very easy and is a question of minutes on any of the supported target operating systems. 
portA supports any equipment architecture. The installation can be scaled from the architecture for a single equipment control server to a huge complex architecture for equipment units consisting of multiple equipment control servers. The integration with the equipment control software of the OEM is realized via an easy to use C/C++-based programming interface. The network communication capabilities make the programming interface as easy to use for single server equipment units as for multiple server equipment units.
In accordance with the interface A specification, CenterPoint | portA enables automated remote access to equipment and process data based on web service technologies.
In contrast to SECSII/GEM, these new standards enable many-to-many relationships between equipment and any kind of client software. Even access to the equipment by multiple simultaneous users is supported by a specific session management and role-base permission concept.
CenterPoint | portA supports additional diagnostic capabilities including web-based performance tracking and filtered log tracing. It is easy to integrate via a bridge which is an application programming interface (API) that connects to the existing automation software.
For use in a fab-wide environment and in conjunction with EDAfactoryController, portA can be equipped with enhanced authentication and authorization capabilities enabling centralized administration of equipment access. Beyond the definition of the standard, this makes the application of SEMI EDA standards more efficient in the fab-wide environment.
More detailed documents and white papers for download:
Implementing equipment side Interface A with portA and EDAfactoryController
The Interface A definition is based on the SEMI EDA (Equipment Data Acquisition) standards. These cover
Concept Documents:
SEMI E120-1104 – Common Equipment Model (CEM)
SEMI E125-1105 – Equipment Self Description (EqSD)
SEMI E132-1105 – Client Authentication and Authorization
SEMI E134-1105 – Data Collection Management (DCM)
SEMI E138-0305 – Common Components
Technical Specifications:
E120.1-1104, E125.1-1105, E132.1-1105, E134.1-1105
Schemas:
E120.1-1104, E125.1-0305, E132.1-0305, E134.1-1105, E138.1-0305
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