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Scaleable Oriented Distributed Architecture (SODA)
Commitment to SEMI EDA Standards
Scaleable Oriented Distributed Architecture (SODA)
 
 
 
 
 
 

 

Increasing Manufacturing Efficiency through a
Factory-wide View of Your Data

Integrating your test and manufacturing data within a single platform enables you to perform leading-edge equipment and process diagnostics, monitoring and control tasks.

High performance, large volume equipment data collection
and uni/multivariate correlations enable
Equipment and Chamber Matching

Powerful correlation and uni/multivariate classification methods enable single and inter-process
Fault Detection and Classification

A highly flexible workbench to build the appropriate controllers for any kind of single or multiple parameter input and output
Run to Run Control

Leading-edge learning and prediction techniques applied in
Virtual Metrology

Correlation of inline measurements and final test results to gain final test optimization by
Adaptive Testing

Requirements

Statistical and pattern matching methods enable interactive and automated
Wafer Final Test Diagnostics

Average and Range method to perform single and multi-site
Measurement System Analysis

Leading-edge data mining and visualization techniques for the
Root Cause Analysis
of any combination of process and measurement data throughout the overall process

Solutions

Through the open architecture of our APC\Platform we can deal with almost any existing applications to lift them to a factory-wide holistic approach.

Through our adaptive approach we can already support techniques you have not even thought about yet.